Applications
Electrostatic Chuck (ESC) is the part to fix the wafer in semiconductor manufacturing equipment by the power of static electricity. Generally ESC is classified into monopolar type and bipolar type according to the number of electrodes. And it also divied into COLUMB type and JONSEN-RAHBEK type depending on the the size of Dielectric Resistivity.
Our Service
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- ESC Repair
- Ceramic plate Re-bonding
Our Technique
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- ESC NEW Design
- ESC Body Design
- ESC Plate Design
- ESC Electrode Design
- ESC 3D Design
- ESC Heater Design
- ESC Repair Technology
- Sheet Bonding
- Bonding
- Heater Bonding
- Plate de-Bonding
- Specialized processing of material
- Processing of Ceramic plate & AlN & SiC
- Processing of Fine Particle Pattern
- Processing of Special Polishing
- Processing of Micro flatness
- Test & Inspection
- Roughness & Flatness Inspection
- Electronic Inspection
- ESC NEW Design